PRELIMINARY PROGRAM

Monitoring and Control Techniques
for
Intelligent Epitaxy II

April 6-10, 1997
Lodge at Kananaskis / Kananaskis Hotel
Kananaskis Village, Alberta, Canada

Conference Chair
George Maracas
Motorola

Conference Co-Chair
David Aspnes
North Carolina State University

Engineering Foundation Conferences
345 East 47th Street, Suite 303
New York, NY 10017
Phone: 1-212-705-7836 Fax: 1-212-705-7441
E-mail: engfnd@aol.com WWW: http://www.engfnd.org

Sunday, 6 April 1997

3:00 pm - 9:00 pm Registration

6:00 pm - 7:30 pm Dinner

7:30 pm - 8:00 pm CONFERENCE OPENING
Introductions and Conference Overview
George Maracas, Conference Chair
Frank Schmidt, Engineering Foundation

8:00 pm - 10:00 pm Opening Reception

Monday, 7 April 1997

7:00 am - 8:30 am Breakfast

GROWTH CONTROL SOFTWARE
Session Chair: TBA

8:45 am - 9:10 am Architectures for Integrated Modeling, Monitoring and Control of MOVPE
Jeff Tsao
Sandia National Laboratory

9:10 am - 9:35 am Client/Server Approach to Semiconductor Epitaxial Growth Control Software
Jim Vlcek
EPI MBE Product Group

9:35 am - 10:00 am Virtual Control Simulator as a Design Tool for Closed-Loop Epitaxial Growth
Henry Lee
University of California - Irvine

10:00 am - 10:30 am Coffee Break

10:30 am - 10:50 am Application of Sensor Fusion Techniques to the Control of MBE
John Roth
Hughes Research Laboratories

10:50 am - 11:10 am A Novel Intelligent Thin Film Deposition System
Seyed Tabatabaei
University of Maryland

11:10 am - 11:30 am Modeling and Nonlinear Control of a Modem Effusion Cell
Matthew Tucker
University of Colorado

11:30 am - 11:50 am Modeling Metal Physical Vapor Deposition
Liaowang Zhou
University of Virginia

12:00 noon - 1:30 pm Lunch

1:45 pm - 5:00 pm Ad hoc sessions and/or free time

5:00 pm - 6:00 pm Cash bar

6:00 pm - 7:30 pm Dinner

PYROMETRY AND TEMPERATURE CONTROL
Session chair: TBA

7:30 pm - 7:50 pm Closed-Loop Temperature Control of MBE Group III Solid Sources Using an Atomic Absorption Optical Flux Monitor
Andrew Jackson
University of California - Santa Barbara

7:50 pm - 8:10 pm Composition Control During the Growth of InGaAs on InP Using Spectroscopic Ellipsometry
Shane Johnson
Arizona State University

8:10 pm - 8:30 pm The Effect of Optical Interference on Diffused Reflectance Spectroscopy Monitoring of Substrate Temperature During Epitaxial Growth
Henry Lee
University of California - Irvine

8:30 pm - 8:45 pm Coffee Break

8:45 pm - 9:05 pm A Model for Substrate Temperature Dynamics in MBE
John Roth
Hughes Research Laboratories

9:05 pm - 9:25 pm Nonlinear Control of the Substrate Temperature During MBE Growth
Adam Bennett
University of Colorado

9:25 pm - 9:40 pm Improved Knudsen Cell Thermal Control Using Optical Fiber Thermometry
Stephen Adams

9:40 pm - 10:00 pm Discussion

10:00 pm - 11:00 pm Social Hour

Tuesday, 8 April 1997

7:00 am - 8:30 am Breakfast

REAL TIME OPTICAL MONITORING
Session Chair: TBA

8:30 am - 8:50 am Real-Time Diagnostics of II-VI Molecular Beam Epitaxy by Spectral Ellipsometry
Walter Duncan
Texas Instruments, Inc.

8:50 am - 9:10 am In-Situ Control of III-V Semiconductor Growth by Reflectance Anisotropy Spectroscopy (RAS) and Spectroscopy Ellipsometry (SE)
Martin Zorn
Technical University of Berlin

9:10 am - 9:30 am Temperature Control During the Growth of InGaAs on InP Using Band Edge Thermometry
Shane Johnson
Arizona State University

9:30 am - 9:50 am Determining Alloy Composition With High Accuracy in Real Time By In situ Spectroscopic Ellipsometry
Blaine Johs
J.A. Woollam Company

10:00 am - 10:30 am Coffee Break

10:30 am - 10:50 am In-Situ Monitoring of Surface and Bulk Properties of Semiconductor Contactless CV & PL
Hideki Hasegawa
Hokkaido University

10:50 am - 11:10 am Sensing and Real-Time Control of Group III and V Fluxes in MBE Using a Multi-Element Optical Absorption Flus Monitor
Peter Brewer
Hughes Research Laboratories

11:10 am - 11:30 am Real-Time Controlled Epitaxy of Vertical Cavity Surface Emitting Lasers (VCSELs) Using a Standard Pyrometer
Gerhard Bohm
Technical University of Munich

11:30 am - 12:00 noon Discussion

12:00 noon - 1:30 pm Lunch

1:30 pm - 5:00 pm Ad hoc sessions and/or free time

5:00 pm - 6:00 pm Cash Bar

6:00 pm - 7:30 pm Dinner

FLUORESCENCE/ABSORPTION TECHNIQUES
Session Chair: TBA

7:30 pm - 7:50 pm Application of a Photoemission Oscillation Sensor to Growth of Resonant Tunneling Structures for Integrated Circuits
David Chow
Hughes Research Laboratories

7:50 pm - 8:10 pm Photoemission Oscillations for Submonolayer Thickness Control in Molecular Beam Epitaxy
J.J. Zinck
Hughes Research Laboratories

8:10 pm - 8:30 pm Strategies for Applying Multi-Channel Atomic Absorption Flux Monitor to Control the Growth of MBE Devices
P.R. Pinsukanjana
University of California - Santa Barbara

8:30 pm - 8:50 pm Optical and Nuclear Decay Monitoring of InP Grown by MBE with a GaP Source for Phosphorous
Mario Beaudoin
University of British Columbia

8:50 pm - 9:20 pm Discussion

9:30 pm - 10:30 pm Social Hour

Wednesday, 9 April 1997

7:00 am - 8:30 am Breakfast

ELECTRON AND ION BEAM TECHNIQUES
Session Chair: TBA

8:30 am - 8:50 am Real-Time Monitoring of Si Monolayer Incorporation in GaAs During MBE by RHEED and RAS
Daweritz Lutz

8:50 am - 9:10 am Time Series Modeling of MBE RHEED Signals Using Neural Networks
Kyeong Lee
Georgia Institute of Technology

9:10 am - 9:30 am In-Situ Monitoring of Molecular Beam Epitaxy Using Specularly Scattered Ion Beam Current Oscillations
Scott Barnett
Northwestern University

9:30 am - 9:50 am Ion Scattering Spectroscopy During InGaAs Molecular Beam Epitaxy: Reduction of Sputtering Using Glancing-Angle Ar Ions
Greg Labanda
Northwestern University

10:00 am - 10:30 am Coffee Break

10:30 am - 12:00 noon Discussion

12:00 noon - 1:30 pm Lunch

1:30 pm - 5:00 pm Ad hoc sessions and/or free time

5:00 pm - 6:00 pm Cash Bar

6:00 pm - 7:30 pm Dinner

TRANSMISSION/REFLECTION TECHNIQUES
Session Chair: TBA

7:30 pm - 8:00 pm Determination of the Quality of In-Situ Monitoring of Composition and Thickness by Spectroscopic Ellipsometry Compared with Ex-Situ Techniques
Eyink Kurt

8:00 pm - 8:30 pm XXX

TBA

8:30 pm - 9:00 pm XXX
TBA

9:00 pm - 9:30 pm Discussion

9:30 pm - 10:30 pm Social Hour

Thursday, 10 April 1997

7:00 am - 8:30 am Breakfast

MASS SPECTROSCOPY TECHNIQUES
Session Chair: TBA

8:30 am - 9:00 am XXX
TBA

9:00 am - 9:30 am XXX
TBA

9:45 am - 10:15 am Coffee Break

10:30 am - 11:45 am Discussion

12:00 noon - 1:30 pm Lunch and Departure

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